Allen [12] examined the surface roughness evolution of ion-beam polishing fused silica, and the effects showed the area roughness worth amplified with an increase in the elimination depth. Concurrently, experiments have also shown that ion-beam sputtering can effectively lessen area roughness [13,14]. Bradley and Harper founded the linear evolution theory https://www.facebook.com/permalink.php?story_fbid=pfbid02qy5RYwv9mRHSFYwncPbxRsdtEco9SbCfbnAheuxAs1drJAu8uwWJX23DPnghtnrcl&id=61560512640678&__cft__[0]=AZVECecDFdwp9WLUavNF_NqeonZijvhHENjG_jRXUkIllE4rZhtTITKA7DzRPFiCrjUDolI-fwlu6SlV1ZocBH1QSpBAIUaos6uRPM6WHrpvENB0AOmAeSmmRHi6IjeC61mKPY3WIjRCHG32rBXdK1FipgkW4L5HdVUDxJaypqhtJVInTZ65MpOC8-z_2ill-etiShQwY4Hz3k3jBopbGrBj&__tn__=%2CO%2CP-R